Lub siab ntsuas siv N-hom monocrystalline silicon wafer ua lub hauv paus. Ua ntej, cov silicon wafer tau ua rau hauv cov zauv quab yuam-nqa cov tswv cuab nrog qee yam qauv geometric. Ntawm no, txoj haujlwm quab yuam ntawm ib leeg siv lead ua silicon wafer tau ua rau plaub P-hom diffused resistors raws cov lus qhia sib txawv, thiab tom qab ntawd plaub tus tiv thaiv tau siv los ua plaub Arm Arm Wheatstone choj, nyob rau hauv kev nqis tes ntawm sab nraud quab yuam, kev hloov pauv ntawm tus nqi tsis kam ua hluav taws xob teeb liab tso tawm. Tus choj Wheatstone no nrog cov nyom siab yog lub plawv ntawm lub ntsuas siab thiab feem ntau hu ua piezoresistive choj Circuit Court (Daim duab 1). Cov yam ntxwv ntawm tus choj txuas hluav taws xob piezoresistive yog: resistance Tus nqi tiv thaiv ntawm plaub caj npab ntawm tus choj txuas yog tib yam (txhua R0); Effect Cov txiaj ntsig piezoresistive ntawm cov caj npab uas nyob ib sab ntawm tus choj Circuit Court muaj tus nqi ib yam thiab tus yam ntxwv txawv; Resistance Qhov tsis kam ntawm plaub txhais caj npab ntawm tus choj Circuit Tus ntsuas kub zoo ib yam, thiab nyob rau qhov kub ib yam txij thaum pib mus txog thaum kawg. Ntawm daim duab, R0 yog tus nqi tiv thaiv thaum tsis muaj kev ntxhov siab ntawm qhov kub hauv tsev; 墹 RT yog qhov kev hloov pauv los ntawm qhov kub coefficient tsis kam (α) thaum qhov kub hloov pauv; 墹 Rδ yog qhov kev hloov pauv tsis zoo tshwm sim los ntawm kev quab yuam (ε); tus choj Qhov hluav taws xob tso tawm yog u=I0 thiab Rδ=I0RGδ (qhov txuas tam sim no qhov choj)
Hauv cov qauv, I0 yog qhov txuas tam sim no qhov tam sim no, thiab E yog qhov hluav taws xob qhov hluav taws xob tas li. Qhov hluav taws xob tso tawm ntawm cov choj txuas hluav taws xob piezoresistive tam sim ntawd cuam tshuam nrog kev sib zog quab yuam (ε), thiab tsis muaj dab tsi ua nrog RT tshwm sim los ntawm qhov kub coefficient ntawm tus tiv thaiv, uas txo qis qhov kub ntawm qhov inductor. Kev siv ntau tshaj plaws siv hluav taws xob ntsuas hluav taws xob yog lub ntsuas hluav taws xob ntsuas. Cov txheej txheem tseem ceeb yog txhua lub thawv ntim khoom uas tsim los ntawm cov khoom siv hluav taws xob photovoltaic (Daim duab 2). Lub diaphragm tau ua rau hauv lub khob zoo, thiab sab hauv lub khob yog ib feem ntawm lub zog sab nraud, thiab kev sib txuas ntawm lub siab tau ua rau hauv qab ntawm lub khob. Siv cov khoom siv ib yam silicon ib yam khoom siv los ua lub hauv paus puag ncig, thiab tom qab ntawv khi lub diaphragm rau lub hauv paus. Hom kev ntsuas siab no muaj qhov zoo ntawm kev nkag siab siab, qhov loj me, kev ua kom ruaj khov, thiab lwm yam, thiab tau siv dav hauv dav hlau, dav hlau, khoom siv, thiab khoom siv kho mob.
