MEMS yog lub npe luv ntawm micro-motor system. Tus neeg miniaturization loj ntawm cov khoom tiav yog nyob rau ntawm millimeter lossis txawm micron theem. Nws yog dav siv hauv 5G kev sib txuas lus, kev saib xyuas kev ruaj ntseg, kev lag luam automation, automotive electronics thiab lwm yam. Nyob rau theem no, nws tuaj yeem hais tias yuav luag txhua yam khoom siv hluav taws xob tau siv rau MEMS.
MEMS cov cuab yeej zoo: me me, lub teeb yuag, kev sib koom ua ke yooj yim, siv hluav taws xob tsawg, siab rhiab heev thiab ntau lwm yam zoo. Thiab tuaj yeem ua tau loj. Txawm hais tias nws tuaj yeem ua tau loj, MEMS ntim tsis yog thoob ntiaj teb. Raws li hom kev ua haujlwm sib txawv ntawm MEMS cov khoom, cov qauv tivthaiv thiab cov txheej txheem ntim khoom sib txawv, thiab hom kev ua haujlwm siab dua.
Chip-theem sib dhos tshuab feem ntau yog siv rau theem no. Lawm, muaj cov kev cai nruj heev ntawm kev sib dhos qhov tseeb, kev ua haujlwm ib puag ncig, thiab cov txheej txheem sib dhos.
Nyuaj ntawm MEMS nti-theem sib dhos
1. High ntim precision txheem
MEMS system software suav nrog cov ntaub ntawv sib txuas lus tshwj xeeb, vaj tsev, sab hauv phab ntsa thiab lwm cov qauv, uas ua rau kom muaj kev nyuaj ntawm txoj hauj lwm thiab lub kaum sab xis tswj thaum xaiv thiab muab tso rau hauv tag nrho cov txheej txheem ntawm kev sib txuas ntawm MEMS cov khoom thiab cov khoom siv ntau yam.
2. Cov khoom yog tsis yooj yim thiab tawg yooj yim
MEMS cov khoom siv, xws li micro-accelerometers, micro-motors, thiab lwm yam, feem ntau muaj cov qauv siv tshuab xws li kab noj hniav lossis cantilever ua hauv. Lawv yooj yim heev rau kev sib cuag ntawm lub cev thaum sib dhos thiab lwm yam txheej txheem.
Ntau qhov chaw ntawm MEMS cov cuab yeej tsis yog tsuas yog me me xwb, tab sis kuj tsis yooj yim thiab tsis yooj yim, xws li qhov sib sib zog nqus grooves thiab sectors, yog li kev ua haujlwm siab siv thaum lub sij hawm sib txuas yog qhov tseem ceeb heev. Yog tias lub siab ua haujlwm tsawg dhau, qhov kev sib txuas yuav tsis nyob ze; yog tias lub siab ua haujlwm siab dhau lawm, cov khoom yuav raug puas tsuaj.
Nws tuaj yeem pom tau tias cov qib raug raug thiab kev sib koom ua ke amplitudes yog qhov tsim nyog rau kev txhim kho tus nqi dhau ntawm MEMS xov tooj cua zaus transceiver installation.
Thaum lub thickness ntawm lub MEMS ntaus ntawv yog nyob nruab nrab ntawm 50-150μm, cov xaiv hlau bonding ua hauj lwm siab nyob rau hauv nruab nrab ntawm 50-100g, thiab cov kev hloov pauv yuav tsum tsawg tshaj li 0.3 °, yog li ntawd qhov kev puas tsuaj rau lub Cheebtsam yuav txo tau mus rau ib tug loj npaum li cas. , thiab kev ua raws cai tuaj yeem txhim kho. Tus nqi.
High-precision alignment, thaj hom, kom paub meej tus nqi dhau
Micron-theem tawm tswv yim kom tau txais cov ntaub ntawv tseeb, ± 0.01N quab yuam tswj qhov tseeb, ± 2μm linear repeatability raug qib, ± 0.01 ° kev sib hloov rov ua kom raug qib, radial deflection tsawg dua 10μm, encoder daws teeb meem specification 1μm, muaj nyob rau hauv cov zis ruaj khov txawm nyob rau hauv siab. -kev ua haujlwm nrawm, txhim kho tus nqi tsim nyog thiab ruaj khov.
Lub tshuab nqus tsev nqus, tswj tau ua haujlwm siab, txo kev noj
Guoao linear rotary lub cev muaj zog txais hollow Z-axis tsim, tshwj xeeb tracheal socket, nqus nqus, ntsaws thiab ua si, thiab tuaj yeem muab cov kev pabcuam customized raws li cov qauv thiab cov yam ntxwv ntawm cov khoom;
Muaj ib" mos tsaws" muaj nuj nqi, uas tuaj yeem ua tiav kev tswj hwm ruaj khov nyob rau hauv ± 1.5g, thiab tuaj yeem hloov kho qhov tsis zoo xws li kev nrawm, nrawm thiab kev tswj hwm lub zog, kom lub taub hau tso kawm tuaj yeem kov MEMS cov khoom nrog lub siab ua haujlwm zoo, txo qis.
& quot;Z+R" axis integrated tsim kom ceev ceev
Lub tswv yim tshiab ob-axis kev daws teeb meem ua ke cov tsoos" servo lub cev muaj zog + pob ntsia hlau" rau hauv ib qho, uas tuaj yeem daws qhov teeb meem ntawm qhov hnyav ntawm tus kheej ntawm Z-axis, thiab ua tiav cov khoom Pick& Qhov chaw, qhov chaw, thiab lwm yam kev ua ntawm kev kub ceev thiab precision. Thrust Lub nkhaus yog du, lub ncov thrust yog 8-50N, lub zog stroke yog 10-50mm, thiab lub ultra-siab voj voog lub neej enables npaum ntau lawm.
